——The preferred choice for industry-supporting customers with higher demands for control accuracy and repeatability.

The EC100 series Yidu Intelligent can replace imported mass flow controllers MFC. Through precise compensation from built-in pressure and temperature sensors and core algorithms, it demonstrates outstanding performance in low zero point, temperature, and pressure drift. The robust metal housing ensures durability and strong resistance to electromagnetic interference in complex industrial environments. Additionally, it features built-in settings for multiple gases and gas mixtures, as well as digital and analog communication methods, enabling precise measurement and control of flow.

Flow range: 0.5 sccm ~ 5000 slpm

Features:

l Principle: Laminar differential pressure flowmeter

l High accuracy: ±0.5% of set value

l High repeatability: ±0.1% F.S.

l Wide temperature and pressure range: -20°C ~ 60°C, within 1 MPa

l Standard: Digital signal RS485; Optional: Analog signal 0-20mA or 0~5V

l Built-in measurement for 70 gases and gas mixtures

l Provides PC software for real-time display and data download

Usage conditions:

l Compatible with built-in 70 gases and editable gas mixtures

l Valve type: N/C (normally closed)

l Operating flow range: 1% ~ 120% F.S.

l Medium temperature: -20°C ~ 60°C

l Ambient temperature: -20°C ~ 50°C

l Operating humidity: 0% ~ 98% (non-condensing)

l Operating differential pressure range: 100 kPa ~ 700 kPa

l Operating pressure: 1 MPa

l Pressure resistance: 1.5 MPa

l Supply voltage: ﹢(19~29) VDC

l Current consumption: <150 mA (at 24V supply voltage), <300 mA (<5V)

l Installation method: Any angle

l Inlet/outlet: Pipe thread (internal thread)

l Gas contact material: SUS304, SUS316L

l Gas contact sealing material: O-ring seal: Fluororubber

Application scenarios:

l Flow control components in optical and atomic coating equipment

l Integration and support for flow control systems in manufacturing equipment

l Flow control components in fine chemical production lines

l Flow control components in bioreactor成套 equipment

l Flow control components in gas distribution systems or devices

l Flow control components in analytical instruments and scientific instruments

l Flow control components in customized成套 automation equipment

The EC100 series Yidu Intelligent can replace imported mass flow controllers MFC is suitable for supporting users with higher requirements for accuracy and repeatability.